vacuum chemical vapor deposition

vacuum chemical vapor deposition
vakuuminis cheminis garinis nusodinimas statusas T sritis radioelektronika atitikmenys: angl. vacuum chemical vapor deposition vok. chemische Vakuumabscheidung aus der Gasphase, f rus. химическое осаждение из паровой фазы в вакууме, n pranc. déposition chimique en phase vapeur sous vide, f

Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. . 2000.

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